• K8凯发国际

      Horizontal PECVD (Two-In-One)

      PRODUCTS AND SERVICES > Horizontal Furnaces Series > Horizontal PECVD (Two-In-One)

      Horizontal PECVD (Two-In-One)

      AlOx+SiN deposition.

      Equipment Name:

      Horizontal PECVD (Two-In-One)

      Equipment Model:

      PD-520/PD-520L/PD-520MAX

      Equipment Application:

      AlOx+SiN deposition.


      Features:


      1、The AIOx & SiN layers can be coated in the same furnace tube which helps in reducing the process steps,improving the yield and lowering the breakage rate effectively.  

      2、Optimal throughout solution: two-in-one configuration. 


      Parameters: